JPH0224445B2 - - Google Patents

Info

Publication number
JPH0224445B2
JPH0224445B2 JP22451885A JP22451885A JPH0224445B2 JP H0224445 B2 JPH0224445 B2 JP H0224445B2 JP 22451885 A JP22451885 A JP 22451885A JP 22451885 A JP22451885 A JP 22451885A JP H0224445 B2 JPH0224445 B2 JP H0224445B2
Authority
JP
Japan
Prior art keywords
circuit
light
signal
output
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22451885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6285812A (ja
Inventor
Juji Fujihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keyence Corp
Original Assignee
Keyence Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence Corp filed Critical Keyence Corp
Priority to JP22451885A priority Critical patent/JPS6285812A/ja
Publication of JPS6285812A publication Critical patent/JPS6285812A/ja
Publication of JPH0224445B2 publication Critical patent/JPH0224445B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP22451885A 1985-10-08 1985-10-08 光学式変位計 Granted JPS6285812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22451885A JPS6285812A (ja) 1985-10-08 1985-10-08 光学式変位計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22451885A JPS6285812A (ja) 1985-10-08 1985-10-08 光学式変位計

Publications (2)

Publication Number Publication Date
JPS6285812A JPS6285812A (ja) 1987-04-20
JPH0224445B2 true JPH0224445B2 (en]) 1990-05-29

Family

ID=16815049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22451885A Granted JPS6285812A (ja) 1985-10-08 1985-10-08 光学式変位計

Country Status (1)

Country Link
JP (1) JPS6285812A (en])

Also Published As

Publication number Publication date
JPS6285812A (ja) 1987-04-20

Similar Documents

Publication Publication Date Title
JPH0224445B2 (en])
US4309103A (en) Device for contact-free thickness or interval measurement
CN114966730A (zh) 一种基于双入射角混频的激光多普勒测速方法及系统
JPS61105415A (ja) 距離計測装置
JPH0433164B2 (en])
JPS60107514A (ja) 距離測定装置
JPH02118402A (ja) 高精度位置測定回路
JPH067045B2 (ja) 非接触直径測定装置
JP3418234B2 (ja) 測長装置
JP2901747B2 (ja) 距離測定装置
JPS623609A (ja) 測距装置
RU1827551C (ru) Координатно-чувствительный преобразователь излучени
JPS6264904A (ja) 形状測定装置
JP3014891B2 (ja) 光位置検出装置
JPH05209717A (ja) 半導体位置検出素子信号処理回路
CN118363037A (zh) 基于混频器的全速度域激光多普勒测速方法及系统
JPS61105419A (ja) 距離計測装置
JPH01232212A (ja) 変位測定装置
JPH0476587B2 (en])
JPS62288512A (ja) 変位測定装置
JPS6269102A (ja) 位置および角度検出装置
JPH0212008A (ja) 非接触変位測定装置
JPS63243715A (ja) 非接触距離測定装置
JPH0511173A (ja) 測距装置
JPH04118556U (ja) 探針走査型顕微鏡